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高質(zhì)量磷化銦和銻化鎵襯底制備技術(shù)進(jìn)展及批量生產(chǎn)Progress in Preparation Technology and Batch Production of High Quality InP and GaSb Substrates趙有文珠海鼎泰芯源晶體有限公司董事長ZHAO YouwenChairman of Zhuhai DT Wafer-Tech Co.,lTD